Silicon-wafer manufacturing
Polishing, etching and cleaning processes are essential for silicon-wafer manufacturing. However, ordinary metallic bearings are not suitable for all processes. Plastic is the sole material that can be used in any of the required steps. This is the greatest merit of plastic bearings.
Recommendations
PE-A
[Inner and outer ring material] – [Ball material]
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For more information about tolerances and other issues, download a catalogue from here.